Low Cost Tools for High Tech Learning
Oxidation Furnace ModuleThe furnace is a 3 zone quartz tube kiln designed to heat substrates to 1000°C in a contained, controlled atmosphere. This system is a miniature version of the industry standard horizontal furnace (minus the cantilever paddle) and supports oxidation, anneals, and LPCVP. The programmable PID controller allows for overnight runs.
Stainless Steel Scavenger
Optional Water Bubbler for Wet Ox
220 or 208 VAC
Programmable Controller for Overnight Runs
1 Year Warranty
3 Zone PID Temp Control
Low Cost of Ownership
Optional TEOS Hotwall LPCVD (coming soon!)
Optional Mass Flow Controller Gas System (Rotameters Standard)
Quartz Lined Load Tray
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